SPIE Proceedings [SPIE Optical Metrology - Munich, Germany (Monday 23 June 2003)] Microsystems Engineering: Metrology and Inspection III - MEMS optical switch control and integrated packaging
- 作者Cai, Hong; Gorecki, Christophe; Chan, Chong Wei; Wang, Yixin; Lu, Chao; Asundi, Anand K.; Liu, Ai Qun
- 卷第5145卷
- 印刷ISSN0277-786X
- 文件大小221.85KB
- 发表时间2003
- DOI10.1117/12.500339
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