Reduction of oxygen contamination in AlN
- 作者J. Salzman; S. Prawer; B. Meyler; Y. Golan; M. Shandalov; R. Sauer; N. Teofilov
- 期第7期
- 印刷ISSN1610-1634
- 电子ISSN1610-1642
- 文件大小131.45KB
- 发表时间2003
- DOI10.1002/pssc.200303387
- 页码2541-2544
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