Electron beam effects on diethylsilane-covered Si(100) surfaces investigated by x-ray photoelectron spectroscopy
- 作者P. W. Wang; J. Lozano; K. R. Kimberlin; J. H. Craig Jr
- 卷第35卷
- 期第13期
- 印刷ISSN0142-2421
- 电子ISSN1096-9918
- 文件大小133.71KB
- 发表时间2003
- DOI10.1002/sia.1622
- 页码1041-1045