Electron beam effects on diethylsilane-covered Si(100) surfaces investigated by electron stimulated and temperature programmed desorption

• 作者P. W. Wang; J. Lozano; K. R. Kimberlin; P. Petrany; V. Young; J. H. Craig Jr.
• 卷第35卷
• 期第13期
• 印刷ISSN0142-2421
• 电子ISSN1096-9918
• 文件大小104.56KB
• 发表时间2003
• DOI10.1002/sia.1623
• 页码1046-1049