SPIE Proceedings [SPIE Advanced Microelectronic Manufacturing - Santa Clara, CA (Sunday 23 February 2003)] Cost and Performance in Integrated Circuit Creation - Does technology acceleration equate to mask cost acceleration?
- 作者Trybula, Walter J.; Wong, Alfred K. K.; Monahan, Kevin M.; Grenon, Brian J.
- 卷第5043卷
- 印刷ISSN0277-786X
- 文件大小89.97KB
- 发表时间2003
- DOI10.1117/12.485285
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