SPIE Proceedings [SPIE Microtechnologies for the New Millennium 2003 - Maspalomas, Gran Canaria, Canary Islands, Spain (Monday 19 May 2003)] Nanotechnology - Are we there yet? Looking beyond the end of scaling in the Nanometer Era
- 作者Tiwari, Sandip; Vajtai, Robert; Aymerich, Xavier; Avci, Uygar E.; Liu, C. C.; Kish, Laszlo B.; Rubio, Angel; Xue, Lei; Kumar, Arvind; Kim, Sang K.; Silva, Helena G.
- 卷第5118卷
- 印刷ISSN0277-786X
- 文件大小787.19KB
- 发表时间2003
- DOI10.1117/12.502018
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