Chemical Modification of Titanium Nitride Films via Ion Implantation
- 期刊名称MATERIALS TRANSACTIONS
- 作者Aizawa, Tatsuhiko; Mitsuo, Atsushi; Akhadejdamrong, Thananan
- 卷第44卷
- 期第10期
- 印刷ISSN1345-9678
- 电子ISSN1347-5320
- 文件大小450.56KB
- 发表时间2003
- DOI10.2320/matertrans.44.1962
- 页码1962-1970
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