Low temperature Si0.85 Ge0.15 oxynitridation in wet-nitric oxide ambient
- 期刊名称MRS Proceedings
- 作者Dasgupta, Anindya; Takoudis, Christos G.
- 卷第765卷
- 电子ISSN1946-4274
- 文件大小126.05KB
- 发表时间2003
- DOI10.1557/PROC-765-D3.26
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