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[AIP RAREFIED GAS DYNAMICS: 23rd International Symposium - Whistler, British Columia (Canada) (20-25 July 2002)] AIP Conference Proceedings - Comparison of Navier-Stokes and DSMC Gas Flow Models in Semiconductor Process Chambers

[AIP RAREFIED GAS DYNAMICS: 23rd International Symposium - Whistler, British Columia (Canada) (20-25 July 2002)] AIP Conference Proceedings - Comparison of Navier-Stokes and DSMC Gas Flow Models in Semiconductor Process Chambers

Gochberg, Lawrence. A.

作者Gochberg, Lawrence. A.
卷第663卷
文件大小92.99KB
发表时间2003
DOI10.1063/1.1581658
页码1073-1078

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