Si self-diffusivity using isotopically pure 30Si epitaxial layers
- 作者S.R. Aid; T. Sakaguchi; K. Toyonaga; Y. Nakabayashi; S. Matumoto; M. Sakuraba; Y. Shimamune; Y. Hashiba; J. Murota; K. Wada; T. Abe
- 印刷ISSN0921-5107
- 文件大小99.62KB
- 发表时间2004
- DOI10.1016/j.mseb.2004.07.055
- 页码330-333
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