Finite size effects in stress analysis of interconnect structures
- 作者Noyan, I. C.; Murray, Conal E.; Chey, Jay S.; Goldsmith, Charles C.
- 卷第85卷
- 期第5期
- 电子ISSN0003-6951
- 文件大小310.19KB
- 发表时间2004
- DOI10.1063/1.1776331
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