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Controlled fabrication of Mo-seeded Si microcones by Ar+-ion bombardment

Controlled fabrication of Mo-seeded Si microcones by Ar+-ion bombardment

Masaki Tanemura; H. Yamauchi; Y. Yamane; T. Okita; S. Tanemura

作者Masaki Tanemura; H. Yamauchi; Y. Yamane; T. Okita; S. Tanemura
卷第215卷
印刷ISSN0168-583X
文件大小435.15KB
发表时间2004
DOI10.1016/j.nimb.2003.08.025
页码137-142

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