A low-power resonant micromachined compass

• 期刊名称Journal of Micromechanics and Microengineering
• 作者Leïchlé, Thierry C; Arx, Martin Von; Reiman, Stephen; Zana, Iulica; Ye, Wenjing; Allen, Mark G
• 卷第14卷
• 期第4期
• 印刷ISSN0960-1317
• 电子ISSN1361-6439
• 文件大小423.58KB
• 发表时间2004-04-01
• DOI10.1088/0960-1317/14/4/005
• 页码462-470