Structural design and experimental characterization of torsional micromachined gyroscopes with non-resonant drive mode
- 期刊名称Journal of Micromechanics and Microengineering
- 作者Acar, Cenk; Shkel, Andrei M
- 卷第14卷
- 期第1期
- 印刷ISSN0960-1317
- 电子ISSN1361-6439
- 文件大小1004.53KB
- 发表时间2004-01-01
- DOI10.1088/0960-1317/14/1/303
- 页码15-25
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