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[IEEE 17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest - Maastricht, Netherlands (25-29 Jan. 2004)] 17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest - NiW-micro springs for chip connection

[IEEE 17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest - Maastricht, Netherlands (25-29 Jan. 2004)] 17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest - NiW-micro springs for chip connection

Kruger, C.; Mokwa, W.; Schnakenberg, U.

作者Kruger, C.; Mokwa, W.; Schnakenberg, U.
文件大小293.51KB
发表时间2004
DOI10.1109/MEMS.2004.1290536
页码117-120

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