发现好书期刊，享受阅读乐趣

海量图书期刊资源，随时随地畅享阅读乐趣

Development of a Deep Silicon Phase Fresnel Lens Using Gray-Scale Lithography and Deep Reactive Ion Etching

Development of a Deep Silicon Phase Fresnel Lens Using Gray-Scale Lithography and Deep Reactive Ion Etching

Morgan, B.; Waits, C.M.; Krizmanic, J.; Ghodssi, R.

期刊名称Journal of Microelectromechanical Systems
作者Morgan, B.; Waits, C.M.; Krizmanic, J.; Ghodssi, R.
卷第13卷
期第1期
印刷ISSN1057-7157
文件大小546.19KB
发表时间2004-02
DOI10.1109/JMEMS.2003.823220
页码113-120

← 返回【学霸图书馆】主页