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Analysis of step-based silicon surfaces at facet boundaries during wet anisotropic etching

Analysis of step-based silicon surfaces at facet boundaries during wet anisotropic etching

Stateikina, I.; Elalamy, M.-Z.; Landsberger, L. M.; Kahrizi, M.

期刊名称Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
作者Stateikina, I.; Elalamy, M.-Z.; Landsberger, L. M.; Kahrizi, M.
卷第22卷
期第3期
印刷ISSN0734-2101
文件大小1235.48KB
发表时间2004
DOI10.1116/1.1691078

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