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Novel low-frequency oscillation in a radio-frequency inductively coupled plasma with tuned substrate

Novel low-frequency oscillation in a radio-frequency inductively coupled plasma with tuned substrate

Ding, Z. F.; Huo, W. G.; Wang, Y. N.

期刊名称Physics of Plasmas
作者Ding, Z. F.; Huo, W. G.; Wang, Y. N.
卷第11卷
期第6期
印刷ISSN1070-664X
文件大小565.15KB
发表时间2004
DOI10.1063/1.1740772

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