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Preparation of GaN films on ZnO buffer layers by rf magnetron sputtering

Preparation of GaN films on ZnO buffer layers by rf magnetron sputtering

Hyoun Woo Kim; Nam Ho Kim

作者Hyoun Woo Kim; Nam Ho Kim
卷第236卷
印刷ISSN0169-4332
文件大小450.46KB
发表时间2004
DOI10.1016/j.apsusc.2004.04.029
页码192-197

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