Production of higher silanes in radio frequency SiH[sub 4] and H[sub 2]-SiH[sub 4] plasmas
- 期刊名称Journal of Applied Physics
- 作者Horvath, P.; Rozsa, K.; Gallagher, A.
- 卷第96卷
- 期第12期
- 印刷ISSN0021-8979
- 文件大小407.33KB
- 发表时间2004
- DOI10.1063/1.1786666
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