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Measurements of desorbed products by plasma beam irradiation on SiO[sub 2]

Measurements of desorbed products by plasma beam irradiation on SiO[sub 2]

Kurihara, Kazuaki; Yamaoka, Yoshikazu; Karahashi, Kazuhiro; Sekine, Makoto

期刊名称Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
作者Kurihara, Kazuaki; Yamaoka, Yoshikazu; Karahashi, Kazuhiro; Sekine, Makoto
卷第22卷
期第6期
印刷ISSN0734-2101
文件大小353.50KB
发表时间2004
DOI10.1116/1.1795830

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