Nitrogen Diffusion and Interaction with Oxygen in Si
- 期刊名称Solid State Phenomena
- 作者Voronkov, Vladimir; Falster, Robert
- 电子ISSN1662-9779
- 文件大小213.23KB
- 发表时间2004
- DOI10.4028/www.scientific.net/SSP.95-96.83
- 页码83-92
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