Radical Nitridation of Ultra-Thin SiO2/SiC Structure
- 期刊名称Materials Science Forum
- 作者Yano, Hiroshi; Furumoto, Y.; Niwa, T.; Hatayama, Tomoaki; Uraoka, Yukiharu; Fuyuki, Takashi
- 电子ISSN1662-9752
- 文件大小206.62KB
- 发表时间2004
- DOI10.4028/www.scientific.net/MSF.457-460.1333
- 页码1333-1336
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