Mechanisms in Electrochemical Etching of α-SiC Substrates
- 期刊名称Materials Science Forum
- 作者Mikami, Hideno; Hatayama, Tomoaki; Yano, Hiroshi; Uraoka, Yukiharu; Fuyuki, Takashi
- 电子ISSN1662-9752
- 文件大小347.31KB
- 发表时间2004
- DOI10.4028/www.scientific.net/MSF.457-460.813
- 页码813-816
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