Surface Charge Analysis of Ultrathin HfO[sub 2], SiO[sub 2], and Si[sub 3]N[sub 4]
- 期刊名称Journal of The Electrochemical Society
- 作者Takeuchi, Hideki; King, Tsu-Jae
- 卷第151卷
- 期第2期
- 印刷ISSN0013-4651
- 文件大小136.12KB
- 发表时间2004
- DOI10.1149/1.1636740
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