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Fabrication of smooth amorphous carbon micro-cantilevers by lift-off

Fabrication of smooth amorphous carbon micro-cantilevers by lift-off

D. Sheeja; B.K. Tay; S.P. Lau; L.J. Yu; J.M. Miao; H.C. Chua; W.I. Milne

作者D. Sheeja; B.K. Tay; S.P. Lau; L.J. Yu; J.M. Miao; H.C. Chua; W.I. Milne
卷第98卷
印刷ISSN0925-4005
文件大小557.55KB
发表时间2004
DOI10.1016/j.snb.2003.10.026
页码275-281

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