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The physical and mathematical basis of stratification in electronegative plasmas

The physical and mathematical basis of stratification in electronegative plasmas

Lampe, Martin; Manheimer, Wallace M; Fernsler, Richard F; Slinker, Steven P; Joyce, Glenn
  • 期刊名称Plasma Sources Science and Technology
  • 作者Lampe, Martin; Manheimer, Wallace M; Fernsler, Richard F; Slinker, Steven P; Joyce, Glenn
  • 卷第13卷
  • 期第1期
  • 印刷ISSN0963-0252
  • 电子ISSN1361-6595
  • 文件大小489.22KB
  • 发表时间2004-02-01
  • DOI10.1088/0963-0252/13/1/003
  • 页码15-26
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