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Calibration of AFM cantilever stiffness: a microfabricated array of reflective springs

Calibration of AFM cantilever stiffness: a microfabricated array of reflective springs

Peter J. Cumpson; Peter Zhdan; John Hedley

作者Peter J. Cumpson; Peter Zhdan; John Hedley
卷第100卷
印刷ISSN0304-3991
文件大小393.74KB
发表时间2004
DOI10.1016/j.ultramic.2003.10.005
页码241-251

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