The effect of silicon doping and thermal annealing on the electrical and structural properties of hydrogenated amorphous carbon thin films

• 期刊名称Diamond and Related Materials
• 作者Okpalugo, T.I.T.; Maguire, P.D.; Ogwu, A.A.; McLaughlin, J.A.D.
• 卷第13卷
• 印刷ISSN0925-9635
• 文件大小105.18KB
• 发表时间2004-4
• DOI10.1016/j.diamond.2003.11.032
• 页码1549-1552