SPIE Proceedings [SPIE Lasers and Applications in Science and Engineering - San Jose, Ca (Sunday 25 January 2004)] Photon Processing in Microelectronics and Photonics III - Nanosecond laser silicon micromachining
- 作者Ren, Jun; Orlov, Sergei S.; Hesselink, Lambertus; Howard, Helen; Conneely, Alan J.; Herman, Peter R.; Fieret, Jim; Pique, Alberto; Okada, Tatsuo; Bachmann, Friedrich G.; Hoving, Willem; Washio, Kunihiko; Xu, Xianfan; Dubowski, Jan J.; Geohegan, David B.; Traeger, Frank
- 卷第5339卷
- 印刷ISSN0277-786X
- 文件大小226.37KB
- 发表时间2004
- DOI10.1117/12.529442
- 页码382-393
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