High-density plasma chemical vapor deposition of amorphous carbon films
- 期刊名称Diamond and Related Materials
- 作者Mousinho, A.P.; Mansano, R.D.; Verdonck, P.
- 卷第13卷
- 期第2期
- 印刷ISSN0925-9635
- 文件大小474.84KB
- 发表时间2004-2
- DOI10.1016/j.diamond.2003.10.024
- 页码311-315
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