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Metal film characterization with qualified spreading resistance

Metal film characterization with qualified spreading resistance

T. Clarysse; I. Hoflijk; W. Zhang; K. Maex; W. Vandervorst

作者T. Clarysse; I. Hoflijk; W. Zhang; K. Maex; W. Vandervorst
文件大小498.60KB
发表时间2004
DOI10.1116/1.1631291

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