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Large-area patterning for photonic crystals via coherent diffraction lithography

Large-area patterning for photonic crystals via coherent diffraction lithography

C. Zanke; M. Qi; H. I. Smith
  • 作者C. Zanke; M. Qi; H. I. Smith
  • 文件大小1234.21KB
  • 发表时间2004
  • DOI10.1116/1.1813448
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