Effects of Air Exposure on SiO 2 Surfaces Irradiated with Fluorocarbon Plasma
- 期刊名称Japanese Journal of Applied Physics
- 作者Kurihara, Kazuaki; Yamaoka, Yoshikazu; Sekine, Makoto
- 卷第43卷
- 期第1期
- 印刷ISSN0021-4922
- 电子ISSN1347-4065
- 文件大小94.48KB
- 发表时间2004-1-13
- DOI10.1143/JJAP.43.351
- 页码351-352
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