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Low-Temperature Growth of Thin Silicon Nitride Film by Electron Cyclotron Resonance Plasma Irradiation

Low-Temperature Growth of Thin Silicon Nitride Film by Electron Cyclotron Resonance Plasma Irradiation

L. Zhao; N. H. Luu; D. Wang; Y. Sugimoto; K. Ikeda; H. Nakashima; H. Nakashima
  • 作者L. Zhao; N. H. Luu; D. Wang; Y. Sugimoto; K. Ikeda; H. Nakashima; H. Nakashima
  • 文件大小190.18KB
  • 发表时间2004
  • DOI10.1143/JJAP.43.L47
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