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A New Spectral Imaging Ellipsometer for Measuring the Thickness of Patterned Thin Films

A New Spectral Imaging Ellipsometer for Measuring the Thickness of Patterned Thin Films

W. Chegal; Y. J. Cho; H. J. Kim; H. M. Cho; Y. W. Lee; S. H. Kim

作者W. Chegal; Y. J. Cho; H. J. Kim; H. M. Cho; Y. W. Lee; S. H. Kim
文件大小139.60KB
发表时间2004
DOI10.1143/JJAP.43.6475

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