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Sheath Model for Dual-Frequency Capacitively Coupled Plasmas

Sheath Model for Dual-Frequency Capacitively Coupled Plasmas

K. Denpoh; G. Wakayama; K. Nanbu

作者K. Denpoh; G. Wakayama; K. Nanbu
文件大小243.25KB
发表时间2004
DOI10.1143/JJAP.43.5533

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