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Difference in Thermal Degradation Behavior of ZrO
<sub/>2</sub>
and HfO
<sub/>2</sub>
Anodized Capacitors

Difference in Thermal Degradation Behavior of ZrO ₂ and HfO ₂ Anodized Capacitors

Kamijyo, Masahiro; Onozuka, Tomotake; Yoshida, Naoto; Shinkai, Satoko; Sasaki, Katsutaka; Yamane, Misao; Abe, Yoshio

期刊名称Japanese Journal of Applied Physics
作者Kamijyo, Masahiro; Onozuka, Tomotake; Yoshida, Naoto; Shinkai, Satoko; Sasaki, Katsutaka; Yamane, Misao; Abe, Yoshio
卷第43卷
印刷ISSN0021-4922
电子ISSN1347-4065
文件大小297.73KB
发表时间2004-9-9
DOI10.1143/jjap.43.6217
页码6217-6220

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