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Design, fabrication and characterization of single crystal silicon microactuator for hard disk drives

Design, fabrication and characterization of single crystal silicon microactuator for hard disk drives

J. Q. Mou; Y. Lu; J. P. Yang; Q. H. Li; G. X. Guo

作者J. Q. Mou; Y. Lu; J. P. Yang; Q. H. Li; G. X. Guo
文件大小464.04KB
发表时间2004
DOI10.1088/0960-1317/14/12/002

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