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SPIE Proceedings [SPIE Smart Structures and Materials - San Diego, CA (Sunday 14 March 2004)] Smart Structures and Materials 2004: Industrial and Commercial Applications of Smart Structures Technologies - Active damping elements for improving the accuracy of a microlithography machine

SPIE Proceedings [SPIE Smart Structures and Materials - San Diego, CA (Sunday 14 March 2004)] Smart Structures and Materials 2004: Industrial and Commercial Applications of Smart Structures Technologies - Active damping elements for improving the accuracy of a microlithography machine

Holterman, Jan; Anderson, Eric H.; de Vries, Theo J.

作者Holterman, Jan; Anderson, Eric H.; de Vries, Theo J.
卷第5388卷
印刷ISSN0277-786X
文件大小752.39KB
发表时间2004
DOI10.1117/12.538937

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