SPIE Proceedings [SPIE Lasers and Applications in Science and Engineering - San Jose, Ca (Sunday 25 January 2004)] Photon Processing in Microelectronics and Photonics III - Analysis of debris generated during UV laser micromachining of silicon
Herman, Peter R.; O'Connor, Gerard M.; Howard, Helen; Fieret, Jim; Pique, Alberto; Conneely, Alan J.; Glynn, Thomas J.; Okada, Tatsuo; Bachmann, Friedrich G.; Hoving, Willem; Washio, Kunihiko; Xu, Xianfan; Dubowski, Jan J.; Geohegan, David B.; Traeger, Frank
- 作者Herman, Peter R.; O'Connor, Gerard M.; Howard, Helen; Fieret, Jim; Pique, Alberto; Conneely, Alan J.; Glynn, Thomas J.; Okada, Tatsuo; Bachmann, Friedrich G.; Hoving, Willem; Washio, Kunihiko; Xu, Xianfan; Dubowski, Jan J.; Geohegan, David B.; Traeger, Frank
- 卷第5339卷
- 印刷ISSN0277-786X
- 文件大小837.33KB
- 发表时间2004
- DOI10.1117/12.529248