X-ray photoelectron spectroscopic study of surface modification of low-k organic materials by plasma treatment
- 作者Y. Uchida; T. Fukuda; H. Yanazawa
- 卷第36卷
- 期第8期
- 印刷ISSN0142-2421
- 电子ISSN1096-9918
- 文件大小123.85KB
- 发表时间2004
- DOI10.1002/sia.1734
- 页码677-680
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