SPIE Proceedings [SPIE Lasers and Applications in Science and Engineering - San Jose, Ca (Sunday 25 January 2004)] Photon Processing in Microelectronics and Photonics III - Single-pulse microvia drilling of resin-coated copper substrates using an enhanced peak power planar waveguide CO 2 laser
- 作者Herman, Peter R.; Moorhouse, Colin J.; Villarreal, Francisco; Fieret, Jim; Pique, Alberto; Wendland, Jozef J.; Baker, Howard J.; Okada, Tatsuo; Bachmann, Friedrich G.; Hall, Denis R.; Hand, Duncan P.; Hoving, Willem; Washio, Kunihiko; Xu, Xianfan; Dubowski, Jan J.; Geohegan, David B.; Traeger, Frank
- 卷第5339卷
- 印刷ISSN0277-786X
- 文件大小154.10KB
- 发表时间2004
- DOI10.1117/12.532310
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