Fabrication of semiconductor-and polymer-based photonic crystals using nanoimprint lithography

• 作者E. M. Arakcheeva; E. M. Tanklevskaya; S. I. Nesterov; M. V. Maksimov; S. A. Gurevich; J. Seekamp; C. M. Sotomayor Torres
• 卷第50卷
• 期第8期
• 印刷ISSN1063-7842
• 电子ISSN1090-6525
• 文件大小413.71KB
• 发表时间2005-08
• DOI10.1134/1.2014536
• 页码1043-1047