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[IEEE 2005 International Conference on MEMS,NANO and Smart Systems - Banff, AB, Canada (24-27 July 2005)] 2005 International Conference on MEMS,NANO and Smart Systems - A New Method of Electrostatic Force Modeling for MEMS Sensors and Actuators

[IEEE 2005 International Conference on MEMS,NANO and Smart Systems - Banff, AB, Canada (24-27 July 2005)] 2005 International Conference on MEMS,NANO and Smart Systems - A New Method of Electrostatic Force Modeling for MEMS Sensors and Actuators

Chowdhury, S.; Ahmadi, M.; Miller, W.C.

作者Chowdhury, S.; Ahmadi, M.; Miller, W.C.
文件大小295.72KB
发表时间2005
DOI10.1109/ICMENS.2005.16
页码431-435

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