[IEEE 2005 International Conference on MEMS,NANO and Smart Systems - Banff, AB, Canada (24-27 July 2005)] 2005 International Conference on MEMS,NANO and Smart Systems - Optical MEMS pressure sensor using ring resonator on a circular diaphragm
Pattnaik, P.K.; Vijayaaditya, Bh.; Srinivas, T.; Selvarajan, A.
- 作者Pattnaik, P.K.; Vijayaaditya, Bh.; Srinivas, T.; Selvarajan, A.
- 文件大小176.02KB
- 发表时间2005
- DOI10.1109/ICMENS.2005.94
- 页码277-280