Effect of Substrate Temperature on Crystal Orientation and Residual Stress in RF Sputtered Gallium Nitride Films
- 期刊名称Materials Science Forum
- 作者Kusaka, Kazuya; Hanabusa, Takao; Tominaga, Kikuo; Yamauchi, Noriyoshi
- 电子ISSN1662-9752
- 文件大小246.84KB
- 发表时间2005
- DOI10.4028/www.scientific.net/MSF.490-491.613
- 页码613-618
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