[IEEE 2005 International Conference on MEMS,NANO and Smart Systems - Banff, AB, Canada (24-27 July 2005)] 2005 International Conference on MEMS,NANO and Smart Systems - Verifying Finite Element Simulation for a Piezoresistive MEMS Sensor

• 作者Benfield, D.; Moussa, W.; Lou, E.
• 文件大小79.74KB
• 发表时间2005
• DOI10.1109/ICMENS.2005.131
• 页码454-454