Structurally decoupled micromachined gyroscopes with post-release capacitance enhancement
- 期刊名称Journal of Micromechanics and Microengineering
- 作者Acar, Cenk; Shkel, Andrei M
- 卷第15卷
- 期第5期
- 印刷ISSN0960-1317
- 电子ISSN1361-6439
- 文件大小3277.81KB
- 发表时间2005-05-01
- DOI10.1088/0960-1317/15/5/028
- 页码1092-1101
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