[IEEE 13th International Conference on Semiconducting and Insulating Materials, 2004. SIMC-XIII-2004. - Beijing, People's Republic of China (Sept. 20-25, 2005)] 13th International Conference on Semiconducting and Insulating Materials, 2004. SIMC-XIII-2004. - N doped a-SiC:H films deposited by PECVD and annealed by pulse electron beam

• 作者Huran, J.; Hotov, I.; Dubeck, F.; Balalykin, N.I.
• 文件大小250.90KB
• 发表时间2005
• DOI10.1109/SIM.2005.1511394
• 页码93-97